Fig. 1. Schematic diagram of beam quality measurement

Fig. 2. Simulation results of fused quartz glass (CORNING7980) in COMSOL

Fig. 3. Flow chart of simulation of thermal aberration on laser beam quality change

Fig. 4. Effect of laser thermal aberration on laser beam quality

Fig. 5. Flow chart of polarization characteristics simulation

Fig. 6. Simulation of beam quality factors under different polarization states

Fig. 7. Optical path design of compression module

Fig. 8. Simulation flow chart of compression module wave aberration on laser beam quality factor

Fig. 9. Wavefront diagram of compression module under 0° field of view

Fig. 10. Fitting curves of laser beam quality factor M² for compression module under 0° field of view

Fig. 11. Beam quality factor M² at different field angles