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Opto-Electronic Engineering, Volume. 47, Issue 4, 180654(2020)

Modeling and inverse compensation control of hysteresis nonlinear characteristics of piezoelectric steering mirror

Liu Xin1...2,3, Li Xinyang1,2,*, and Du Rui12 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Liu Xin, Li Xinyang, Du Rui. Modeling and inverse compensation control of hysteresis nonlinear characteristics of piezoelectric steering mirror[J]. Opto-Electronic Engineering, 2020, 47(4): 180654

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    Paper Information

    Category: Article

    Received: Dec. 13, 2018

    Accepted: --

    Published Online: May. 27, 2020

    The Author Email: Xinyang Li (xyli@ioe.ac.cn)

    DOI:10.12086/oee.2020.180654

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology