Optical Instruments, Volume. 46, Issue 1, 49(2024)

Simulation of the effects of partial etched gratings on diffracted beams

Jun QIAN and Jingya XIE*
Author Affiliations
  • School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
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    References(17)

    [4] [4] BOEUF F, CREMER S, TEMPITI E, et al. Recent progress in silicon photonics R&D manufacturing on 300mm wafer platfm[C]2015 Optical Fiber Communications Conference Exhibition (OFC). Los Angeles: IEEE, 2015: 1 3.

    [6] [6] KNOLL D, LISCHKE S, BARTH R, et al. Highperfmance photonic BiCMOS process f the fabrication of highbwidth electronicphotonic integrated circuits[C]2015 IEEE International Electron Devices Meeting (IEDM). Washington: IEEE, 2015: 15.6. 1 15.6. 4.

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    Jun QIAN, Jingya XIE. Simulation of the effects of partial etched gratings on diffracted beams[J]. Optical Instruments, 2024, 46(1): 49

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    Paper Information

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    Received: Mar. 4, 2023

    Accepted: --

    Published Online: Mar. 6, 2024

    The Author Email: XIE Jingya (xiejy@usst.edu.cn)

    DOI:10.3969/j.issn.1005-5630.202303040038

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