Optical Instruments, Volume. 46, Issue 1, 49(2024)
Simulation of the effects of partial etched gratings on diffracted beams
[4] [4] BOEUF F, CREMER S, TEMPITI E, et al. Recent progress in silicon photonics R&D manufacturing on 300mm wafer platfm[C]2015 Optical Fiber Communications Conference Exhibition (OFC). Los Angeles: IEEE, 2015: 1 3.
[6] [6] KNOLL D, LISCHKE S, BARTH R, et al. Highperfmance photonic BiCMOS process f the fabrication of highbwidth electronicphotonic integrated circuits[C]2015 IEEE International Electron Devices Meeting (IEDM). Washington: IEEE, 2015: 15.6. 1 15.6. 4.
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Jun QIAN, Jingya XIE. Simulation of the effects of partial etched gratings on diffracted beams[J]. Optical Instruments, 2024, 46(1): 49
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Received: Mar. 4, 2023
Accepted: --
Published Online: Mar. 6, 2024
The Author Email: XIE Jingya (xiejy@usst.edu.cn)