Fig. 1. Schematic diagram of experimental device for pulse shaping of F-P cavity

Fig. 2. Femtosecond laser pulse train shaped by F-P cavity

Fig. 3. SEM images of regular NSRs induced by Gaussian laser pulse at different scanning velocity

Fig. 4. The laser fluence window of spaced，regular and partly damaged NSRs induced by Gaussian laser pulse on silicon

Fig. 5. SEM images of regular NSRs induced by femtosecond laser pulse train with scanning velocity of 6 mm/s

Fig. 6. Schematic diagram of femtosecond laser pulse train induced regular NSRs

Fig. 7. Laser fluence window of NSRs induced by femtosecond laser pulse train on silicon with scanning velocity of 6 mm/s

Fig. 8. Depth comparison of NSRs induced by Gaussian laser pulse and femtosecond laser pulse train of 100 ps

Fig. 9. The relationship between laser fluence and depth of NSRs induced by femtosecond laser pulse train of 100 ps

Fig. 10. Duty cycle analysis of NSRs induced by femtosecond laser pulse train of 100 ps

Fig. 11. DSOA analysis of regular NSRs induced by Gaussian laser pulse and femtosecond laser pulse train

Fig. 12. Edge roughness analysis of regular NSRs induced by Gaussian laser pulse and femtosecond laser pulse train