Chinese Optics Letters, Volume. 3, Issue 10, 10589(2005)

A novel method to determine the FOCAL energy range

Dongqing Zhang1,2, Xiangzhao Wang1, and Weijie Shi1
Author Affiliations
  • 1Information Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
  • 2Graduate School of the Chinese Academy of Sciences, Beijing 100039
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    CLP Journals

    [1] Liping Guo, Xiangzhao Wang, Huijie Huang, "Analysis of illumination pupil filling ellipticity for critical dimensions control in photolithography," Chin.Opt.Lett. 4, 04237 (2006)

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    Dongqing Zhang, Xiangzhao Wang, Weijie Shi, "A novel method to determine the FOCAL energy range," Chin.Opt.Lett. 3, 10589 (2005)

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    Paper Information

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    Received: Mar. 17, 2005

    Accepted: --

    Published Online: Jun. 6, 2006

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