A novel method to determine the FOCAL energy range

Dongqing Zhang; Xiangzhao Wang; Weijie Shi

Chinese Optics Letters, Volume. 3, Issue 10, 10589(2005)

Dongqing Zhang^1,2, Xiangzhao Wang¹, and Weijie Shi¹

¹Information Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800

²Graduate School of the Chinese Academy of Sciences, Beijing 100039

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Determination of the energy range is an important precondition of focus calibration using alignment procedure (FOCAL) test. A new method to determine the energy range of FOCAL off-lined is presented in this paper. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, post exposure bake (PEB) temperature, PEB time and development time, on the energy range of FOCAL are analyzed.

Keywords

100.2550 120.0120 230.0230 and metrology measurement 050.0050 diffraction and gratings focal-plane-array image processors instrumentation optical devices

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Dongqing Zhang, Xiangzhao Wang, Weijie Shi. A novel method to determine the FOCAL energy range[J]. Chinese Optics Letters, 2005, 3(10): 10589

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