Infrared and Laser Engineering, Volume. 46, Issue 4, 420002(2017)

Study on connected defective elements in focal plane array identification by response and crosstalk

Hou Zhijin1,2,3、*, Fu Li1, Wang Wei2,3, Lv Yanqiu2,3, Lu Zhengxiong2,3, and Wang Jinchun2,3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • show less

    The connected defective elements in Focal Plane Array (FPA) were tested by optical microscopy and FPA test-bench. The reasons of forming connected defective elements in FPA were studied. Results show that it is difficult to identify connected defective elements by optical microscopy. And it is also difficult to identify connected defective elements by FPA response testing bench because the response voltage of connected defective elements is basically the same as that of normal elements. The connected defective elements can be identified effectively by FPA crosstalk testing bench because the crosstalk between connected defective elements is 100%, which is obviously different from that of the normal elements. At this point, the response voltage of connected defective elements is average of that of the normal elements. The tables with connecting or the electrodes with connecting caused by the process of photolithography and eroding result in the generation of the connected defective elements. As well as the indium bump with connecting caused by the process of photolithography and lift-off also leads to the generation of the connected defective elements. Fabrication process such as photolithography, eroding and lift-off was optimized to reduce connected defective elements.

    Tools

    Get Citation

    Copy Citation Text

    Hou Zhijin, Fu Li, Wang Wei, Lv Yanqiu, Lu Zhengxiong, Wang Jinchun. Study on connected defective elements in focal plane array identification by response and crosstalk[J]. Infrared and Laser Engineering, 2017, 46(4): 420002

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: 光电器件与微系统

    Received: Aug. 8, 2016

    Accepted: Sep. 20, 2016

    Published Online: Jun. 30, 2017

    The Author Email: Zhijin Hou (changhui090504@126.com)

    DOI:10.3788/irla201746.0420002

    Topics