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Acta Optica Sinica, Volume. 35, Issue 11, 1112006(2015)

Research on a Wavenumber Resolved Low Coherence Interferometry for Step Height Measurement

Zhao Keqiang*, Xie Fang, Ma Sen, Wang Yunzhi, and Chen Liang
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    Zhao Keqiang, Xie Fang, Ma Sen, Wang Yunzhi, Chen Liang. Research on a Wavenumber Resolved Low Coherence Interferometry for Step Height Measurement[J]. Acta Optica Sinica, 2015, 35(11): 1112006

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 4, 2015

    Accepted: --

    Published Online: Oct. 15, 2015

    The Author Email: Keqiang Zhao (kqzhao33@126.com)

    DOI:10.3788/aos201535.1112006

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology