Optics and Precision Engineering, Volume. 18, Issue 4, 928(2010)

Development and test of high-speed movement measuring machine

CHEN Ji1,*... ZHAO Xiao-ming1, CAO Jiu-da2 and GUO Chao1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(9)

    [1] [1] ZHANG H T, FEN T J,CAO H T,et al..Key technology and development trend of high speed machine tool[J].Machinery Manufacture,2006,44(3):12-14.(in Chinese)

    [3] [3] YANG K M,YE P Q,YIN W SH.Motion controller design of precision stage based on linear motor[J].Micro of Abrication Technology,2005,9(3):76-79.(in Chinese)

    [5] [5] ZHANG C P,LIU Q.Development of high performance linear motor stage based on static-pressure air-bearing slider[J].Mechanical Science & Technology, 2006,10(10):1212-1216.(in Chinese)

    [7] [7] SUO R, FAN ZH J, LI Y, et al..Dual-frequency laser interferometer present state and development[J].Laser & Infrared, 2004,34(4):251-253.(in Chinese)

    [9] [9] WEN X L.Linear motor and its application in high-speed precise machine tool[J].Mechanical Research & Application, 2005,18(4):19-20.(in Chinese)

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    CHEN Ji, ZHAO Xiao-ming, CAO Jiu-da, GUO Chao. Development and test of high-speed movement measuring machine[J]. Optics and Precision Engineering, 2010, 18(4): 928

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    Paper Information

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    Received: May. 19, 2009

    Accepted: --

    Published Online: Aug. 31, 2010

    The Author Email: Ji CHEN (chenji@cqu.edu.cn)

    DOI:

    CSTR:32186.14.

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