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Infrared and Laser Engineering, Volume. 45, Issue 5, 520007(2016)

Fourier transform infrared spectrometer based on electro-thermal MEMS micro-mirror

Lu Anjiang1,2、*, Zhang Zhengping1, Bai Zhongchen2, Chen Qiao3, and Qin Shuijie2
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Lu Anjiang, Zhang Zhengping, Bai Zhongchen, Chen Qiao, Qin Shuijie. Fourier transform infrared spectrometer based on electro-thermal MEMS micro-mirror[J]. Infrared and Laser Engineering, 2016, 45(5): 520007

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    Paper Information

    Category: 光电器件与微系统

    Received: Sep. 5, 2015

    Accepted: Oct. 7, 2015

    Published Online: Jun. 12, 2016

    The Author Email: Anjiang Lu (39146565@qq.com)

    DOI:10.3788/irla201645.0520007

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology