Infrared and Laser Engineering, Volume. 45, Issue 5, 520007(2016)
Fourier transform infrared spectrometer based on electro-thermal MEMS micro-mirror
In order to develop the small, low-cost, high-resolution spectrometer, a miniaturization Fourier transform infrared spectrometer was design. By selecting electro-thermal MEMS micro-mirror as the moving mirror of Michelson interferometer to make the Fourier spectrometer miniaturization and portability. At the same time, to ensure a higher resolution, the folding double S Bimorph drive structure of double displacements was designed. The beam splitter was external for selection different wave band flexibly to achieve full spectrum range. Moreover, it used 1 310 nm laser as a reference light source, and tungsten lamp as interference light signal, through the signal acquisition, filtering, interpolation and spectrum recovery steps to complete that signal collected and absorption spectra recovery process. The results show that the displacement of electro-thermal micro-mirror can reach 500 μm, and the theoretical resolution of the spectrum can be up to 1 nm, and the spectrometer machine size as small as 62 mm×62 mm×28 mm. Also the test results show that the baseline noise is 0.000 04, the repeatability of baseline is 0.000 32 and repeatability of absorbance is 0.000 48. The performance can meet spectrum detection applications of the food safety, drug testing, petrochemical and other fields.
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Lu Anjiang, Zhang Zhengping, Bai Zhongchen, Chen Qiao, Qin Shuijie. Fourier transform infrared spectrometer based on electro-thermal MEMS micro-mirror[J]. Infrared and Laser Engineering, 2016, 45(5): 520007
Category: 光电器件与微系统
Received: Sep. 5, 2015
Accepted: Oct. 7, 2015
Published Online: Jun. 12, 2016
The Author Email: Anjiang Lu (39146565@qq.com)