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Optics and Precision Engineering, Volume. 18, Issue 1, 9(2010)

Design of continuous-relief harmonic diffractive microlens array for maskless lithography

SHAN Ming-guang1...2,*, ZHONG Zhi1 and GUO Li-li1 |Show fewer author(s)
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  • 2[in Chinese]
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    SHAN Ming-guang, ZHONG Zhi, GUO Li-li. Design of continuous-relief harmonic diffractive microlens array for maskless lithography[J]. Optics and Precision Engineering, 2010, 18(1): 9

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    Received: Jan. 16, 2009

    Accepted: --

    Published Online: Aug. 31, 2010

    The Author Email: Ming-guang SHAN (smgsir@gmail.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology