Researching | Microcantilever sensors for biochemical detection

Journal of Semiconductors, Volume. 44, Issue 2, 023105(2023)

Microcantilever sensors for biochemical detection

Jingjing Wang¹, Baozheng Xu¹, Yinfang Zhu^2、*, and Junyuan Zhao^2、**

Author Affiliations

¹School of Electronic and Information Engineering, Tiangong University, Tianjin 300380, China

²Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

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Jingjing Wang, Baozheng Xu, Yinfang Zhu, Junyuan Zhao. Microcantilever sensors for biochemical detection[J]. Journal of Semiconductors, 2023, 44(2): 023105

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Paper Information

Category: Articles

Received: Nov. 22, 2022

Accepted: --

Published Online: Mar. 20, 2023

The Author Email: Zhu Yinfang (yfzhu@semi.ac.cn), Zhao Junyuan (junyuanzhao@semi.ac.cn)

DOI:10.1088/1674-4926/44/2/023105

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology