Infrared and Laser Engineering, Volume. 50, Issue 10, 20210004(2021)

TTG-CVD based ZnS material preparation

Shaohua Wu1...2,3, Pan Huang3, Jingsong Zhao1,2,*, Yuejin Zhao4,*, Lihe Zheng5 and Rukun Dong3 |Show fewer author(s)
Author Affiliations
  • 1School of Physics, Beijing Institute of Technology, Beijing 100081, China
  • 2Kunming Institute of Physics, Kunming 650217, China
  • 3Yunnan KIRO Photonics Co., Ltd., Kunming 650217, China
  • 4School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
  • 5School of Physics and Astronomy, Yunnan University, Kunming 650500, China
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    Figures & Tables(9)
    (a) As-grown TTG-CVD-ZnS bulk and (b) device after coating
    XRD patterns of annealed TTG-CVD-ZnS bulk
    Surface topography of TTG-CVD-ZnS tested by SEM and traditional CVD-ZnS
    Infrared transmittance of CVD-ZnS
    Infrared optical system layout of K1509 IR lens
    MTF of TTG-CVD-ZnS based infrared optical lens
    Aberration raised (a) dispersion spot (unit: mm) and (b) distortion in infrared optical lens
    (a) TTG-CVD-ZnS based infrared imaging system module; (b) Infrared imaging for different scenes
    • Table 1. Deposition conditions for ZnS bulk

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      Table 1. Deposition conditions for ZnS bulk

      Fabrication conditionParameters
      Raw materials ratioZn (vapor)/ H2S 1.05-1.2
      Deposition temperature/℃Upper Zone660-670
      Middle Zone600-610
      Base Zone630-640
      Ar flow speed/mL·min−1500 (Zn) 300 (H2S)
      Deposition pressure/kPa~4
      Deposition rate/μm·h−1~60
      Deposition time/d~8
      Annealing temperature/℃900-950
      Annealing time/h10-15
      Total Run time/d~9
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    Shaohua Wu, Pan Huang, Jingsong Zhao, Yuejin Zhao, Lihe Zheng, Rukun Dong. TTG-CVD based ZnS material preparation[J]. Infrared and Laser Engineering, 2021, 50(10): 20210004

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    Paper Information

    Category: Infrared technology and application

    Received: Jan. 6, 2021

    Accepted: --

    Published Online: Dec. 7, 2021

    The Author Email: Zhao Jingsong (zhaojinsong@tsinghua.org.cn), Zhao Yuejin (yjzhao@bit.edu.cn)

    DOI:10.3788/IRLA20210004

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