Optics and Precision Engineering, Volume. 17, Issue 1, 1(2009)

Optimization control of PZT actuated deformable aspheric polishing lap

HU Ziqiang1...2,3,*, LING Ning1, PAN Junhua4, RAO Changhui1 and JIANG Wenhan1 |Show fewer author(s)
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    HU Ziqiang, LING Ning, PAN Junhua, RAO Changhui, JIANG Wenhan. Optimization control of PZT actuated deformable aspheric polishing lap[J]. Optics and Precision Engineering, 2009, 17(1): 1

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    Paper Information

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    Received: Jun. 10, 2008

    Accepted: --

    Published Online: Oct. 9, 2009

    The Author Email: Ziqiang HU (hzqls@126.com)

    DOI:

    CSTR:32186.14.

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