Acta Optica Sinica, Volume. 42, Issue 23, 2312003(2022)

Automatic Aspheric Surface Testing Technology Based on Axial Movement of Knife-Edge Instrument

Xiang Hua1,2,3, Zhaoyang Jiao1,2, and Jianqiang Zhu1,2、*
Author Affiliations
  • 1Key Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2National Laboratory on High Power Laser and Physics, Chinese Academy of Engineering Physics, Chinese Academy of Sciences, Shanghai 201800, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(10)
    Schematic of principle and method[22]. (a) Schematic of knife-edge instrument; (b) schematic of front and rear cutting method of knife-edge along optical axis
    Corresponding relationship between the ring-shaped polishing belts on the mirror to be measured and the optical axis
    Simulation results. (a) Knife-edge shadow grams of convex sphere before and after focal point simulated by Zemax software;(b) extraction results of the annulus
    Experimental optical path
    Experimental results using a plano-convex lens. (a) Knife-edge shadow grams collected along the optical axis; (b) images processed by gray histogram equalization algorithm for collected knife-edge shadow grams; (c) results of the ring-shaped polishing belts after gray processing of collected knife-edge shadow grams
    Experimental results using a concave spherical mirror. (a) Knife-edge shadow grams collected along the optical axis; (b) images processed by gray histogram equalization algorithm for the collected knife-edge shadow grams; (c) results of gray processing of the collected knife-edge shadow grams
    Comparison of ring-shaped polishing belt measured by proposed method and the interferometer under different ring radii. (a) 0.95r; (b) 0.80r; (c) 0.50r; (d) 0.40r
    A series of knife-edge shadow grams collected along the optical axis
    Calculation result of gradient difference sum of knife-edge shadow grams
    • Table 1. Error value of each ring-shaped polishing belts

      View table

      Table 1. Error value of each ring-shaped polishing belts

      Ring belt location0.40r0.50r0.75r0.80r0.95r
      Radius /pixel90110170180200

      Absolute error /pixel

      Relative error /%

      3

      3.3

      3

      2.7

      2

      1.2

      2

      1.1

      3

      1.5

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    Xiang Hua, Zhaoyang Jiao, Jianqiang Zhu. Automatic Aspheric Surface Testing Technology Based on Axial Movement of Knife-Edge Instrument[J]. Acta Optica Sinica, 2022, 42(23): 2312003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Apr. 6, 2022

    Accepted: Jun. 20, 2022

    Published Online: Dec. 14, 2022

    The Author Email: Zhu Jianqiang (jqzhu@siom.ac.cn)

    DOI:10.3788/AOS202242.2312003

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