Optics and Precision Engineering, Volume. 27, Issue 2, 334(2019)
Design and test of electrostatic driving MOEMS arming device
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LIU Jia-kai. Design and test of electrostatic driving MOEMS arming device[J]. Optics and Precision Engineering, 2019, 27(2): 334
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Received: Sep. 12, 2018
Accepted: --
Published Online: Apr. 2, 2019
The Author Email: Jia-kai LIU (liujiakai1129@163.com)
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