To improve the state control safety of a fuze and enhance its ability to resist electromagnetic interference, this paper proposes a silicon-based Micro-Opto-Electro-Mechanical Systems (MOEMS) arming device used in the miniature safety and arming system of a fuze. The device adopts two optical fibers as the carriers of energy transmission, and their misalignment and alignment are controlled through an electrostatic driving mechanism, which determines the safety and arming state of the fuze. The overall structure and coupled optical path of the MOEMS arming device are designed, and subsequently, it is manufactured through a silicon-on-insulator deep reactive-ion etching process. Through experiments evaluating the performances of the electrostatic driving mechanism and optical path, it is concluded that the displacement output of the electrostatic driving mechanism can reach 130 μm, the arming time and restore safety time are 13 ms and 5 ms, respectively, and the light energy transfer efficiency is 46.1%. The MOEMS arming device can satisfy the functional requirements of a fuze and it can have natural resistance to electromagnetic interference, which improves the intrinsic safety of the fuze.