Acta Photonica Sinica, Volume. 31, Issue 6, 762(2002)
PRELIMINARY PROCESS OF MICRO-ETCHING ON THE SURFACE OF COPPER THIN FILM OF CIRCUIT BOARD WITH EXCIMER LASER
References(1)
[2] [2] Arikado T,Sekine M,Okano H,et al.Laser-controlled chemical processing of Surfaces.North-Holland.New York,1984:167～170
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[in Chinese]. PRELIMINARY PROCESS OF MICRO-ETCHING ON THE SURFACE OF COPPER THIN FILM OF CIRCUIT BOARD WITH EXCIMER LASER[J]. Acta Photonica Sinica, 2002, 31(6): 762
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