Fig. 1. Schematic diagram of FHAM-WS

Fig. 2. Flow chart of alignment error analysis of FHAM-WS

Fig. 3. Schematic diagram of focal plane offset error

Fig. 4. Various aberrations and RMS error of ΔW(x,y) introduced by focal plane offset. (a) Various aberrations; (b) RMS error

Fig. 5. Schematic diagram of tilt error and YZ plane when microlens rotating around X-axis. (a) Tilt error; (b) YZ plane

Fig. 6. Various aberrations and RMS error of ΔW(x,y) introduced by tilted microlens array. (a) Various aberrations of ΔW(x,y) introduced by rotation of microlens array around X-axis; (b) various aberrations of ΔW(x,y) introduced by rotation of microlens array around Y-axis; (c) RMS error of ΔW(x,y) varying with tilt angle

Fig. 7. Experimental setup of FHAM-WS

Fig. 8. Z₄ coefficient in ΔW(x,y) introduced by Y-axis tilt error and X-axistilt error varying with tilt angle. (a) Y-axis tilt error;

Fig. 9. S and RMS error of ΔW(x,y) after calibration of offset error of focal plane varying with defocus amount of focal plane. (a) S varying with defocus amount of focal plane; (b) RMS error of ΔW(x,y) varying with defocus amount of focal plane after calibration of offset error of focal plane

Fig. 10. Various aberration sensitivities introduced by focal plane offset error in ΔW(x,y). (a) Defocusing term Z₃; (b) third-order spherical aberration Z₈; (c) fifth-order spherical aberration Z₁₅; (d) seventh-order trilobal aberration Z₁₆

Fig. 11. ΔW(x,y) before and after FHAM-WS calibration. (a) Before calibration; (b) after calibration