Laser & Optoelectronics Progress, Volume. 58, Issue 19, 1900002(2021)
Research on Quality of Micro-Holes Fabricated by Laser Drilling
Fig. 1. Schematic diagrams of micropore quality characteristics. (a) Taper; (b) roundness; (c) recast layer; (d) heat-affected zone; (e) microcracks; (f) spatter deposition around periphery of holes
Fig. 3. Effect of repetition frequency on quality of micro-holes[51-53,55]. (a) Relationship between repetition frequency and diameter of micro-holes; (b) relationship between repetition frequency and depth of micro-holes; (c) relationship among repetition frequency, taper, and heat-affected zone; (d) effect of repetition frequency on roundness of micro-shallow holes
Fig. 6. Effect of laser wavelength on quality of micro-holes[67-68]. (a) Micro-hole section view obtained by 532 nm laser processing; (b) micro-hole section view obtained 1064 nm laser processing; (c) composite material electron microscope image obtained by 1066 nm laser processing; (d) composite material electron microscope image obtained by 266 nm laser processing
Fig. 8. Schematic diagrams of multi-pulse drilling and processing effect[76-79]. (a) Schematic diagram of multi-pulse drilling; (b) SEM images of micro-hole processing of polycarbonate materials with different pulse numbers (pulse numbers are 1, 5, and 100 from left to right); (c) SEM images of titanium foil perforated by ultraviolet femtosecond pulses using multi-beam interference technique; (d) scanning electron microscope image of micro-hole array
Fig. 10. Schematic diagram of spiral drilling and processing effect diagram[91]. (a) Schematic diagram of spiral drilling; (b) micro holes processed by spiral drilling
Fig. 11. Influence of vacuum environment on quality of micro-holes fabricated by laser processing[92-93,95-96]. (a) Micro-holes processed in air; (b) micro-holes processed in vacuum environment; (c) effect of processing under vacuum and air environments on depth of micro-holes; (d) (e) micro-holes formed in air and vacuum corresponding to Fig. 11(c)
Fig. 12. Effect of auxiliary gas on quality of micro-holes[103]. (a) Influence of gas jet type on depth of micro-holes; (b) influence of gas jet type on splashes of micro-holes
Fig. 13. Underwater laser processing[104]. (a) Schematic diagram of laser underwater processing device; (b) micro-holes processed by laser underwater processing; (c) micro-holes processed in air
Fig. 14. Laser water jet processing[109]. (a) Schematic diagram of low-pressure water jet assisted laser processing device; (b) thickness of recast layer of micro-holes processed in air and water
Fig. 15. Micro-holes obtained by water guided laser processing[110]. (a) Principle of water guided laser processing; (b) inlet (top) and outlet (bottom) of microholes processed by water-guided laser
Fig. 16. Laser chemistry asynchronous processing of micro-holes[113]. (a) Schematic diagram of laser chemical asynchronous processing micro-hole device; (b) orifices before and after chemical etching
Fig. 17. Laser chemical simultaneous processing of micro-holes[116]. (a) Schematic diagram of laser chemical simultaneous processing of micro-holes; (b) morphologies of micro-hole sidewalls before and after etching
Fig. 18. Alcohol-assisted laser processing[117]. (a) Schematic diagram of alcohol-assisted laser processing micro-hole device; (b) laser-processed micro-hole in air; (c) alcohol-assisted laser-processed micro-hole
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Yunlong Zhang, Shufeng Sun, Xi Wang, Fengyun Zhang, Li Liu, Shiguang Liu. Research on Quality of Micro-Holes Fabricated by Laser Drilling[J]. Laser & Optoelectronics Progress, 2021, 58(19): 1900002
Category: Reviews
Received: Jan. 6, 2021
Accepted: Feb. 17, 2021
Published Online: Sep. 29, 2021
The Author Email: Sun Shufeng (shufeng2001@163.com)