Acta Optica Sinica, Volume. 37, Issue 6, 631001(2017)
Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm
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Zhang Chao, Zhang Jierui, Wang Yiming, Kuang Shangqi, Xie Yao. Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm[J]. Acta Optica Sinica, 2017, 37(6): 631001
Paper Information
Category: Thin Films
Received: Dec. 23, 2016
Accepted: --
Published Online: Jun. 8, 2017
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