Acta Optica Sinica, Volume. 37, Issue 6, 631001(2017)
Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm
A design approach of the theoretical film system with broad-angle extreme ultraviolet (EUV) multilayers coatings based on the real-coded quantum evolutionary algorithm (RQEA) is proposed. Based on the RQEA and the real-coded genetic algorithm (RGA), the theoretical design and analysis for Mo/Si multilayers coatings with broad angles is performed. It is found that the RQEA has obvious advantages of small population, high efficiency, and high accuracy, which makes the RQEA possess potential application value in the field of optical film design. In addition, the broadband Mo/Si multilayer coatings with reflectivity of up to 50% at incidence angle of 0°-18° and at incident wavelength of 13.5 nm are designed.
Get Citation
Copy Citation Text
Zhang Chao, Zhang Jierui, Wang Yiming, Kuang Shangqi, Xie Yao. Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm[J]. Acta Optica Sinica, 2017, 37(6): 631001
Category: Thin Films
Received: Dec. 23, 2016
Accepted: --
Published Online: Jun. 8, 2017
The Author Email: