[2] [2] JUNG H,GWEON D G.Creep characteristics of piezoelectric actuators[J].Review of Scientific Instruments,2000,71(4):1896-1900.

[3] [3] RIFAI O M E,AUMOND B D,TOMI K Y.Imaging at the nano-scale[C].Proceedings 2003 IEEE/ASME International Conference,Monterey,California,United States,2003:715-722.

[4] [4] KOOPS R,SAWATZKY G A.New scanning device for scanning tunneling microscope applications[J].Review of Scientific Instruments,1992,63(8):4008-4009.

[5] [5] NEWCOMB C V,FLINN I.Improving the linearity of piezoelectric ceramic actuators[J].Electronics Letters,1982,18(11):442-444.

[6] [6] OZER M B,ROYSTOM T J.Modeling the effect of piezoceramic hysteresis in structural vibration control[C].Proceedings of SPIE-The International Society for Optical Engineering,Newport Beach,2001:89-100.

[7] [7] SMITH R C,SALAPAKA M,CHERVENY L.A preisach model for quantifying hysteresis in an atomic force microscope[C].Proceedings of SPIE-The International Society for Optical Engineering,San Diego,2002:498-504.

[8] [8] SMITH R C,HOM C L.Domain wall theory for ferroelectric hysteresis[J].Journal of Intelligent Material Systems and Structures,1999,10(3):195-213.

[9] [9] CHEN W,LYNCH C S.A micro-electro-mechanical model for polarization switching of ferroelectric materials[J].Acta Materialia,1998,46(15):5303-5311.

[11] [11] SMITH R C,HATCH A,MUKHERJEE B.A homogenized energy model for hysteresis in ferroelectric materials:general density formulation[J].Journal of Intelligent Material Systems and Structures,2005,16(9):713-732.

[12] [12] RIFAI O M E,KAMAL Y T.Design and control of atomic force microscopes[C].Proceedings of American Control Conference,Denver,2003:3714-3719.

[13] [13] SEBASTIAN A,SALAPAKA M V,CLEVELAND J P.Robust control approach to atomic force microscopy[C].Proceedings of the IEEE Conference on Decision and Control,United States,2003:3443-3444.

[14] [14] SCHITTER G,STEMMER A,ALLGOWER F.Robust 2 DOF-control of a piezoelectric tube scanner for high speed atomic force microscopy[C].42nd IEEE Conference on Decision and Control United States,2003:3720-3725.

[15] [15] SCHITTER G,MENOLD P,KNAPP H F,et al.High performance feedback for fast scanning atomic force microscopes[J].Review of Scientific Instruments,2001,72(8):3320-3327.

[16] [16] SCHITTER G,STEMMER A.Model-based signal conditioning for high-speed atomic force and friction force microscopy[C].Proceedings of the 28th International Conference on MNE Switzerland,2003:938-944.

[17] [17] OLOOMI H,SHAFAI B.WEIGHT.Selection in mixed sensitivity robust control for improving the sinusoidal tracking performance[C].42nd IEEE Conference on Decision and Control United States,2003:300-305.