Acta Optica Sinica, Volume. 34, Issue 8, 822001(2014)

Selecting System Compensators for Small Scale Projected Objective Using Displaced Parameters Vector

Zhao Yang*, Wang Ping, Zhao Lei, Liu Chunlai, Hua Yangyang, and Men Shudong
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    [2] Cao Zhen, Li Yanqiu, Sun Yuanyuan. Compensator Selection and Accuracy Analysis for Extreme Ultraviolet Lithographic Objective[J]. Acta Optica Sinica, 2015, 35(12): 1211003

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    Zhao Yang, Wang Ping, Zhao Lei, Liu Chunlai, Hua Yangyang, Men Shudong. Selecting System Compensators for Small Scale Projected Objective Using Displaced Parameters Vector[J]. Acta Optica Sinica, 2014, 34(8): 822001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jan. 20, 2014

    Accepted: --

    Published Online: Jul. 9, 2014

    The Author Email: Yang Zhao (juventus-xx@126.com)

    DOI:10.3788/aos201434.0822001

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