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Journal of Semiconductors, Volume. 43, Issue 9, 092802(2022)

Electrical and optical properties of hydrogen plasma treatedβ-Ga2O3 thin films

Qian Jiang1,2, Junhua Meng3, Yiming Shi1,3, Zhigang Yin1,4, Jingren Chen1,4, Jing Zhang2、*, Jinliang Wu1, and Xingwang Zhang1,4、**
Author Affiliations
  • 1Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2School of Information Science and Technology, North China University of Technology, Beijing 100144, China
  • 3Faculty of Science, Beijing University of Technology, Beijing 100124, China
  • 4Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    Qian Jiang, Junhua Meng, Yiming Shi, Zhigang Yin, Jingren Chen, Jing Zhang, Jinliang Wu, Xingwang Zhang. Electrical and optical properties of hydrogen plasma treatedβ-Ga2O3 thin films[J]. Journal of Semiconductors, 2022, 43(9): 092802

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    Paper Information

    Category: Articles

    Received: Mar. 9, 2022

    Accepted: --

    Published Online: Nov. 17, 2022

    The Author Email: Zhang Jing (zhangj@ncut.edu.cn), Zhang Xingwang (xwzhang@semi.ac.cn)

    DOI:10.1088/1674-4926/43/9/092802

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology