Chinese Optics Letters, Volume. 18, Issue 6, 062201(2020)
Optimization based on sensitivity for material birefringence in projection lens
Fig. 3. Birefringence map. (a) Element 1, RMS value is 0.54 nm/cm and PV value is 1.16 nm/cm; (b) element 11, RMS value is 0.52 nm/cm and PV value is 1.26 nm/cm; (c) element 17, RMS value is 0.61 nm/cm and PV value is 1.49 nm/cm.
Fig. 5. Retardation pupil before optimization. (a) Field 1, RMS value is 7.80 nm; (b) field 2, RMS value is 7.07 nm; (c) field 3, RMS value is 6.29 nm.
Fig. 6. OZP coefficients of the retardation pupil before optimization.
Fig. 7. Retardation pupil after optimization. (a) Field 1, RMS value is 2.25 nm; (b) field 2, RMS value is 2.45 nm; (c) field 3, RMS value is 2.77 nm.
Fig. 8. OZP coefficients of the retardation pupil after optimization.
Fig. 9. Comparison of convergence between the PSO and NLS methods.
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Hongbo Shang, Luwei Zhang, Chunlai Liu, Ping Wang, Yongxin Sui, Huaijiang Yang. Optimization based on sensitivity for material birefringence in projection lens[J]. Chinese Optics Letters, 2020, 18(6): 062201
Category: Optical Design and Fabrication
Received: Dec. 18, 2019
Accepted: Feb. 21, 2020
Posted: Feb. 24, 2020
Published Online: May. 9, 2020
The Author Email: Luwei Zhang (zhanglw@ciomp.ac.cn)