Optics and Precision Engineering, Volume. 21, Issue 6, 1425(2013)
Flexure-based X-Y micro-motion mechanism used in lithographic lens
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ZHAO Lei, GONG Yan, ZHAO Yang. Flexure-based X-Y micro-motion mechanism used in lithographic lens[J]. Optics and Precision Engineering, 2013, 21(6): 1425
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Received: Oct. 12, 2012
Accepted: --
Published Online: Jul. 1, 2013
The Author Email: Lei ZHAO (zhaol@sklao.ac.cn)
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