Spectroscopy and Spectral Analysis, Volume. 36, Issue 11, 3461(2016)

Application Progress of Holographic Lithgraphy in Fabrication of Micro-Nano Photonic Structures

WANG Xia1...2, L Hao1,2, ZHAO Qiu-ling1,2, ZHANG Shuai-yi1,2 and TAM Wing-yim3 |Show fewer author(s)
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    WANG Xia, L Hao, ZHAO Qiu-ling, ZHANG Shuai-yi, TAM Wing-yim. Application Progress of Holographic Lithgraphy in Fabrication of Micro-Nano Photonic Structures[J]. Spectroscopy and Spectral Analysis, 2016, 36(11): 3461

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    Paper Information

    Received: Jul. 20, 2015

    Accepted: --

    Published Online: Dec. 30, 2016

    The Author Email:

    DOI:10.3964/j.issn.1000-0593(2016)11-3461-09

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