Spectroscopy and Spectral Analysis, Volume. 36, Issue 11, 3461(2016)
Application Progress of Holographic Lithgraphy in Fabrication of Micro-Nano Photonic Structures
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WANG Xia, L Hao, ZHAO Qiu-ling, ZHANG Shuai-yi, TAM Wing-yim. Application Progress of Holographic Lithgraphy in Fabrication of Micro-Nano Photonic Structures[J]. Spectroscopy and Spectral Analysis, 2016, 36(11): 3461
Received: Jul. 20, 2015
Accepted: --
Published Online: Dec. 30, 2016
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