Opto-Electronic Engineering, Volume. 33, Issue 12, 15(2006)

Research on industrialization of nanofabrication and nanometrology

[in Chinese]1,2 and [in Chinese]1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(4)

    [3] [3] S.Matsui,T.Kaito,M.Komuro,et al.Three-dimensional nanostructure fabrication by focused-ion-beam CVD[J].J.Vac.Sci.Technol,2000,B18:3181-3184.

    [4] [4] Hans LOESCHNER,Gerhard STENGL,Herbert BUSCHBECK.Large-field particle beam optics for projection and proximity printing and for Mask-Less Lithography (ML2)[J].SPIE's Journal of Microlithography,Microfabrication and Microsystems,2003,2:34-48.

    [5] [5] Toshiaki FUJII,Haruo TAKAHASHI.Triple beam for TEM sample preparation[A].9th European FIB Users Group Meeting[C].Arcachon,France:EFUG,2005.3-4.

    [6] [6] Zhaohui CHEN.Development of ion and electron dual FIB apparatus for high spatial resolution three-dimensional microanalysis of solid materials[J].J.Vac.Sci.Technol,1998,B16(4):2473-2478.

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    [in Chinese], [in Chinese]. Research on industrialization of nanofabrication and nanometrology[J]. Opto-Electronic Engineering, 2006, 33(12): 15

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    Paper Information

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    Received: Apr. 22, 2006

    Accepted: --

    Published Online: Nov. 14, 2007

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