Researching | Research on industrialization of nanofabrication and nanometrology

Opto-Electronic Engineering, Volume. 33, Issue 12, 15(2006)

Research on industrialization of nanofabrication and nanometrology

[in Chinese]^1,2 and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

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[3] [3] S.Matsui,T.Kaito,M.Komuro,et al.Three-dimensional nanostructure fabrication by focused-ion-beam CVD[J].J.Vac.Sci.Technol,2000,B18:3181-3184.

[4] [4] Hans LOESCHNER,Gerhard STENGL,Herbert BUSCHBECK.Large-field particle beam optics for projection and proximity printing and for Mask-Less Lithography (ML2)[J].SPIE's Journal of Microlithography,Microfabrication and Microsystems,2003,2:34-48.

[5] [5] Toshiaki FUJII,Haruo TAKAHASHI.Triple beam for TEM sample preparation[A].9th European FIB Users Group Meeting[C].Arcachon,France:EFUG,2005.3-4.

[6] [6] Zhaohui CHEN.Development of ion and electron dual FIB apparatus for high spatial resolution three-dimensional microanalysis of solid materials[J].J.Vac.Sci.Technol,1998,B16(4):2473-2478.

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[in Chinese], [in Chinese]. Research on industrialization of nanofabrication and nanometrology[J]. Opto-Electronic Engineering, 2006, 33(12): 15

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Paper Information

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Received: Apr. 22, 2006

Accepted: --

Published Online: Nov. 14, 2007

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Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology