Optics and Precision Engineering, Volume. 32, Issue 13, 2004(2024)

High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes

Chunan XUE1...3, Jun YU1,3,*, Pengfeng SHENG1,2, Haojie WANG1,3, Zhanshan WANG1,3 and Dongfang WANG4 |Show fewer author(s)
Author Affiliations
  • 1Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai200092, China
  • 2School of Mechanical Engineering, Tongji University, Shanghai0009, China
  • 3Key Laboratory of Advanced Micro-structured Materials, Ministry of Education, Tongji University,Shanghai200092, China
  • 4Optoelectronic Manufacturing Engineering Center, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai200092, China
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    Figures & Tables(19)
    Schematic diagram of Wolter-I
    Measurement device for surface profile of mandrel(Probe 1 measures the surface profile of the mandrel and probe 2 measures the surface profile of the reference mirror)
    Mandrel test process
    Decomposition of measurement errors
    Schematic diagram of spectral confocal probe
    Schematic diagram of assembly error correction
    Measurement system of mandrel
    Variation of repeatability with sampling frequency
    Surface shape and repeatability of reference surface
    Mandrel roundness fitting
    Taper error correction results
    Temperature and humidity monitoring data
    Result of environmental error correction experiment
    Comparison of reference surface corrections
    CGH measurement experiment
    Verification experiment of optical probe and CGH
    Two-dimensional surfaces
    • Table 1. Parameters of high-precision machine tools

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      Table 1. Parameters of high-precision machine tools

      参 数
      X轴水平直线度/μm0.129
      X轴垂直直线度/μm0.360
      Z轴水平直线度/μm0.063
      Z轴垂直直线度/μm0.753
      Y轴分辨率/nm1
      X-Z轴倾斜误差/(″)0.486
      C轴径向运动误差/nm7.21
      C轴轴向运动误差/nm6.58
      C轴角度误差/(″)0.6
      B轴角度分辨率/(″)0.02
    • Table 2. Parameters of spectral confocal probe

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      Table 2. Parameters of spectral confocal probe

      参 数规格
      测量原理光谱共焦
      测量范围300 μm
      分辨率0.09 nm
      重复性±5 nm
      光斑直径5 μm
      横向分辨率2.5 μm
      测量角90°+/-30°
      白光LED光谱范围380~760 nm
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    Chunan XUE, Jun YU, Pengfeng SHENG, Haojie WANG, Zhanshan WANG, Dongfang WANG. High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes[J]. Optics and Precision Engineering, 2024, 32(13): 2004

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    Paper Information

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    Received: Jan. 22, 2024

    Accepted: --

    Published Online: Aug. 28, 2024

    The Author Email: YU Jun (yujun_88831@tongji.edu.cn)

    DOI:10.37188/OPE.20243213.2004

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