Optics and Precision Engineering, Volume. 32, Issue 13, 2004(2024)
High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes
Fig. 2. Measurement device for surface profile of mandrel(Probe 1 measures the surface profile of the mandrel and probe 2 measures the surface profile of the reference mirror)
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Chunan XUE, Jun YU, Pengfeng SHENG, Haojie WANG, Zhanshan WANG, Dongfang WANG. High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes[J]. Optics and Precision Engineering, 2024, 32(13): 2004
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Received: Jan. 22, 2024
Accepted: --
Published Online: Aug. 28, 2024
The Author Email: YU Jun (yujun_88831@tongji.edu.cn)