Optics and Precision Engineering, Volume. 32, Issue 13, 2004(2024)
High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes
The Wolter-type X-ray microscope, known for its high resolution and collecting area, is replacing KB-type X-ray microscopy in advanced light sources and high-energy lasers. A notable method for fabricating Wolter-type X-ray mirrors is nickel electroforming, where the surface accuracy and quality of the replication mandrel crucially impact mirror performance. Preparing the mandrel requires high-precision inspection technology, yet traditional equipment struggles to measure the circumferentially symmetric surface profile of the Wolter type. To address this challenge, we developed an offline detection device using a non-contact probe to measure the mandrel's middle and low frequency surface profile. Systematic and random errors in the detection device were analyzed, and we employed a dual-probe calibration method with a standard mirror, reducing the peak-to-valley (PV) value of drift due to temperature and humidity to 23 nm. A comparative experiment between our detection device and the CGH interferometric detection method showed a deviation of approximately 60 nm in the PV value of the surface test results for the Wolter mandrel, validating the effectiveness and accuracy of our detection method.
Get Citation
Copy Citation Text
Chunan XUE, Jun YU, Pengfeng SHENG, Haojie WANG, Zhanshan WANG, Dongfang WANG. High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes[J]. Optics and Precision Engineering, 2024, 32(13): 2004
Category:
Received: Jan. 22, 2024
Accepted: --
Published Online: Aug. 28, 2024
The Author Email: YU Jun (yujun_88831@tongji.edu.cn)