Optics and Precision Engineering, Volume. 32, Issue 13, 2004(2024)

High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes

Chunan XUE1...3, Jun YU1,3,*, Pengfeng SHENG1,2, Haojie WANG1,3, Zhanshan WANG1,3 and Dongfang WANG4 |Show fewer author(s)
Author Affiliations
  • 1Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai200092, China
  • 2School of Mechanical Engineering, Tongji University, Shanghai0009, China
  • 3Key Laboratory of Advanced Micro-structured Materials, Ministry of Education, Tongji University,Shanghai200092, China
  • 4Optoelectronic Manufacturing Engineering Center, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai200092, China
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    The Wolter-type X-ray microscope, known for its high resolution and collecting area, is replacing KB-type X-ray microscopy in advanced light sources and high-energy lasers. A notable method for fabricating Wolter-type X-ray mirrors is nickel electroforming, where the surface accuracy and quality of the replication mandrel crucially impact mirror performance. Preparing the mandrel requires high-precision inspection technology, yet traditional equipment struggles to measure the circumferentially symmetric surface profile of the Wolter type. To address this challenge, we developed an offline detection device using a non-contact probe to measure the mandrel's middle and low frequency surface profile. Systematic and random errors in the detection device were analyzed, and we employed a dual-probe calibration method with a standard mirror, reducing the peak-to-valley (PV) value of drift due to temperature and humidity to 23 nm. A comparative experiment between our detection device and the CGH interferometric detection method showed a deviation of approximately 60 nm in the PV value of the surface test results for the Wolter mandrel, validating the effectiveness and accuracy of our detection method.

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    Chunan XUE, Jun YU, Pengfeng SHENG, Haojie WANG, Zhanshan WANG, Dongfang WANG. High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes[J]. Optics and Precision Engineering, 2024, 32(13): 2004

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    Paper Information

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    Received: Jan. 22, 2024

    Accepted: --

    Published Online: Aug. 28, 2024

    The Author Email: YU Jun (yujun_88831@tongji.edu.cn)

    DOI:10.37188/OPE.20243213.2004

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