Optical Instruments, Volume. 37, Issue 5, 456(2015)
Thermal stability and interfacial characterization of Co/Mo2C multilayer
[4] [4] NORDGREN J,BRAY G,CRAMM S,et al.Soft x-ray emission spectroscopy using monochromatized synchrotron radiation[J].Review of Scientific Instruments,1989,60(7):1690.
[5] [5] DWIVEDI B N.EUV spectroscopy as plasma diagnostic[J].Space Science Reviews,1993,65 (3/4):289-316.
[6] [6] KEY M H,BARBEE J T W,DA S L B,et al.New plasma diagnostic possibilities from radiography with x.u.v.lasers[J].Journal of Quantitative Spectroscophy and Radiative Transfer,1995,54(1/2):221-226.
[7] [7] SPILLER E.Low-Loss reflection coatings using absorbing materials[J].Applied Physics Letters,1972,20 (9):365-367.
[8] [8] SPILLER E.Reflective multilayer coatings for the far UV region[J].Applied Optics,1976,15 (10):2333-2338.
[9] [9] HAELBICH R-P,KUNZ C.Multilayer interference mirrors for the XUV range around 100eV photon energy[J].Optics Communications,1976,17(3):287-292.
[10] [10] YULIN S,BENOIT N.FEIGL T,et al.Interface-engineered EUV multilayer mirrors[J].Microelectronic Engineering,2006,83(4/9):692-694.
[11] [11] NGUYEN T D,BARBEE J T W.Residual stresses in Mo/Si and Mo2C/Si multilayers[J].SPIE,1998,3444:543-550.
[12] [12] KAISER N,YULIN S A,FEIGL T.Si-based multilayers with high thermal stability[J].SPIE,2000,4146:91-100.
[13] [13] GIGLIA A,MUKHERJEE S,MAHNE N,et al.Thermal effects on Co/Mo2C multilayer mirrors studied by soft x-ray standing wave enhanced photoemission spectroscopy[J].SPIE,2013,8777:877701.
[15] [15] DEN BROEDER F J A,KUIPER D,VAN DE MOSSELAER A P,et al.Perpendicular magnetic anisotropy of Co-Au multilayers induced by interface sharpening[J].Physical Review Letters,1998,60(26):2769-2772.
[16] [16] LUBY S,MAJKOVA E.Tailoring of multilayer interfaces by pulsed laser irradiation[J].Applied Surface Science,2005,248(1/4):316-322.
[17] [17] BAI H L,JIANG E Y,WANG C D.Interdiffusion in Co/C soft X-ray multilayer mirrors[J].Thin Solid Films,1996,286(1/2):176-183.
[18] [18] BAI H L,JIANG E Y,WANG C D.Interdiffusion in CoN/CN soft X-ray multilayer mirrors[J].Thin Solid Films,1997,304(1/2):278-285.
Get Citation
Copy Citation Text
FENG Zhixiang, LI Haochuan, ZHU Jingtao, WU Wenjuan. Thermal stability and interfacial characterization of Co/Mo2C multilayer[J]. Optical Instruments, 2015, 37(5): 456
Category:
Received: Feb. 3, 2015
Accepted: --
Published Online: Jan. 19, 2016
The Author Email: Zhixiang FENG (tongjifzx@yeah.net)