[3] [3] Bierlein J D, Laubacher D B, Brown J B et al.. Dependence of thermal stability of the titanium silicide/silicon structure on impurities. Appl. Phys. Lett., 1990, 56(18): 1725～1727

[4] [4] Leivine B F. A new contribution to the nonlinear optical susceptibilityi arising from unequal atomic radii. Phys. Rev. Lett., 1970, 25(7～17): 440～443

[5] [5] Gavrilenko V I, Wu R Q. Linear and nonlinear optical properties of group-III nitrides. Phys. Rev. (B), 1999, 61(4～15): 2632～2642

[6] [6] Blanc D, Bouchoux A M, Plumereau C et al.. Phase-matched frequency doubling in an aluminum nitride waveguide with a tunable laser source. Appl. Phys. Lett., 1995, 66(6): 659～661

[7] [7] Kravesky I V, Tiginyanu I M. Nonlinear optical response of GaN layers on sapphire: The impact of fundamental beam interference. Appl. Phys. Lett., 2000, 76(7): 810～812

[8] [8] Takashi Fujita, Tatsuo Hasegawa. Determination of second-order nonlinear optical susceptibility of GaN films on sapphire. Jpn. J. Appl. Phys., 2000, 39(5A): 2610～2613

[9] [9] Gaupner P, Pommier J C, Cachard A et al.. Electro-optical effect in aluminum nitride waveguides. J. Appl. Phys., 1992, 71(9): 4136～4139

[10] [10] Fujii Y, Yoshida S, Misawa S et al.. Nonlinear optical susceptibilities of AlN film. Appl. Phys. Lett., 1977, 31(12): 815～816

[11] [11] Lin W P, Lundquist P M, Wong G K et al.. Second order optical nonlinearities of radio frequency sputter-deposited AlN thin films. Appl. Phys. Lett., 1993, 63(21): 2875～2877

[12] [12] Lundquist P M, Lin W P, Xu Z Y et al.. Ultraviolet second harmonic generation in radio-frequency sputter-deposited aluminum nitride thin films. Appl. Phys. Lett., 1994, 65(9): 1085～1087

[13] [13] Hahn D N, Kiehne G T, Ketterson J B. Phase-matched optical second-harmonic generation in GaN and AlN slab waveguides. J. Appl. Phys., 1999, 85(5): 2497～2501

[14] [14] Herman W N, Hayden L M. Maker fringe revisited: second-harmonic generation from birrefringent or absorbing materials. J. Opt. Soc. Am. (B), 1995, 12(3): 416～427

[16] [16] Demiryont H, Thompson L R, Collins GJ. Optical properties of aluminum oxynitrides deposited by laser-assisted CVD. Appl. Opt., 1986, 25: 1311～1318