Optics and Precision Engineering, Volume. 30, Issue 4, 411(2022)
Effect of negative bias voltage on properties of hydrogenated diamond-like carbon films
Figures & Tables(12)
Fig. 2. AFM figures of the sample surface under different bias voltages
Fig. 3. SEM photographs of the sample surface and cross-sections under different bias voltages
Fig. 7. Surface morphology of the top DLC film prepared with the bias voltage of
Fig. 8. Binding force on 45 steel substrate under different bias voltages
Table 1. Deposition process parameters of DLC layers
View tableView in ArticleTable 1. Deposition process parameters of DLC layers
Sample Transition layer H-DLC Top layer H-DLC Gas Pressure/Pa Bias voltage/V Gas Pressure/Pa Bias voltage/V #0 Ar∶C2H2∶H2=2.5∶3∶12 17.5 -1 200 Ar∶C2H2∶H2=
2∶3∶12
17 N/A #1 -600 #2 -800 #3 -1 000 #4 -1 200
Table 2. Film thickness of each layer and total film thickness
View tableView in ArticleTable 2. Film thickness of each layer and total film thickness
Sample δa-Si：C：H
/μm
δtransition layer
/μm
δtop layer
/μm
δtotal
/μm
#0 1.2 5.9 7.1 #1 1.2 6.5 3.5 11.2 #2 1.4 6.2 6.4 14.0 #3 1.2 5.8 9.1 16.1 #4 1.3 5.7 9.3 16.3
Table 3. Raman peaks and their origination of 1000-1800 cm-1
View tableView in ArticleTable 3. Raman peaks and their origination of 1000-1800 cm-1
Peak number Peak position / cm-1 Corresponding origination References Ⅰ ~1 100 Trans-polyacetylene 16 Ⅱ ~1 200 Seven-membered rings in fullerene-like carbon structure 17 -18 Ⅲ ~1 320 D peak of microcrystalline graphite 19 Ⅳ ~1 430 Five-membered rings in fullerene-like carbon structure 17 -18 Ⅴ ~1 550 G peak of disordered graphite 19
Table 4. Raman fitting data
View tableView in ArticleTable 4. Raman fitting data
Sample Pos（D）/cm-1 Pos（G）/cm-1 FWHM（G）/cm-1 ID/IG I（peakⅡ+peakⅣ）/Itotal m/IR/μm #0 1 317.75 1 554.96 152.35 0.858 0.199 0.243 #1 1 311.52 1 545.57 149.74 0.693 0.212 1.200 #2 1 313.04 1 544.44 156.08 0.645 0.188 0.917 #3 1 315.33 1 548.02 155.03 0.700 0.188 0.662 #4 1 319.89 1 551.38 153.57 0.785 0.179 0.441
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Jinhua ZHENG, Qingyun LIU, Zhixiong LI. Effect of negative bias voltage on properties of hydrogenated diamond-like carbon films[J]. Optics and Precision Engineering, 2022, 30(4): 411
Paper Information
Category: Micro/Nano Technology and Fine Mechanics
Received: Jun. 15, 2021
Accepted: --
Published Online: Mar. 4, 2022
The Author Email: LIU Qingyun (liuqingyun332@foxmail.com)
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