Acta Optica Sinica, Volume. 32, Issue 11, 1112004(2012)
A Precision Length Measurement Route by Phase-Shifting Inteferometry with Mechanical Scanning
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Luo Zhiyong, Gu Yingzi, Chen Zhaohui. A Precision Length Measurement Route by Phase-Shifting Inteferometry with Mechanical Scanning[J]. Acta Optica Sinica, 2012, 32(11): 1112004
Paper Information
Received: Apr. 11, 2012
Accepted: --
Published Online: Oct. 25, 2012
The Author Email: Zhiyong Luo (luozhy@nim.ac.cn)
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