Acta Optica Sinica, Volume. 32, Issue 11, 1112004(2012)
A Precision Length Measurement Route by Phase-Shifting Inteferometry with Mechanical Scanning
Based on the application background of length measurement, a novel phase-shifting interferometry is presented. A precise phase-shifting device for length measurement by pressure variation is developed. This device based on single-quartz component is made to carry out the generation of triple phase-shifting, and an essential technique to make online calibration of the capacitor sensor is also realized. The original phase is solved by the developed five-interferogram algorithm with the uncertainty of 0.01% phase periods. The experimental results show that the phase-shifting obtained by this device is up to 1 μm and the variation for length measurement is 0.5 nm.
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Luo Zhiyong, Gu Yingzi, Chen Zhaohui. A Precision Length Measurement Route by Phase-Shifting Inteferometry with Mechanical Scanning[J]. Acta Optica Sinica, 2012, 32(11): 1112004
Received: Apr. 11, 2012
Accepted: --
Published Online: Oct. 25, 2012
The Author Email: Zhiyong Luo (luozhy@nim.ac.cn)