Journal of Applied Optics, Volume. 43, Issue 6, 1138(2022)
Testing technology of vacuum ultraviolet spectral radiance
Figures & Tables(15)
Fig. 1. Schematic diagram of spectral radiance test based on direct measurement method
Fig. 2. Schematic diagram of spectral radiance test based on comparative method
Fig. 3. Schematic diagram of vacuum UV spectral radiance test system
Fig. 4. Physical drawing of vacuum UV spectral radiance test system
Fig. 10. Test results of attenuator transmittance at different wavelengths
Fig. 12. Effect of different vacuum degree environment on vacuum UV spectrum measurement
Table 1. Test results of vacuum UV spectral radiance
View tableView in ArticleTable 1. Test results of vacuum UV spectral radiance
波长/nm 光谱辐射亮度标准值/ （μW/ cm2·nm·sr） 测试结果Lmeasure（λ）/ （μW/ cm2·nm·sr） 相对示值 误差/% 121.2 83.9×103 83.86×103 0.05 135.6 38.08×103 38.16×103 0.21 160 140.4×103 141.04×103 0.46 180 6.29×103 6.30×103 0.16 200 5.80×103 1.34×103 0.17
Table 2. Vacuum UV spectral radiance record of combined attenuator
View tableView in ArticleTable 2. Vacuum UV spectral radiance record of combined attenuator
波长/ nm 光谱辐射 亮度标准值/ （µW/ cm2·nm·sr） 光谱辐射 亮度测量 值/（μW / cm2·nm·sr） 相对示值 误差/% 标准值 L1（λ） 衰减倍率K 最终标 准值L2（λ） 121.2 83.90×103 6.08×105 1.36×10−1 1.34×10−1 1.47 135.6 38.08×103 7.74×105 4.93×10−2 5.00×10−2 1.42 160 140.4×103 8.48×105 1.65×10−1 1.70×10−1 3.03 180 6.29×103 6.44×105 9.76×10−3 9.96×10−3 2.05 200 5.80×103 6.82×105 8.51×10−3 8.73×10−3 2.59
Table 3. Partial test results of vacuum UV spectral radiance repeatability
View tableView in ArticleTable 3. Partial test results of vacuum UV spectral radiance repeatability
测量次数 光谱辐射亮度测试结果/（μW/cm2·nm·sr） 121.2 nm 180 nm 1 1.33×10−1 9.88×10−3 2 1.36×10−1 9.70×10−3 3 1.34×10−1 10.16×10−3 4 1.35×10−1 10.20×10−3 5 1.33×10−1 10.11×10−3 6 1.32×10−1 9.70×10−3 平均值 1.34×10−1 9.96×10−3 重复性 1.344×10−3 2.088×10−4
Tools
Get Citation
Copy Citation Text
Hao LIU, Tianqi ZHAO, Chunlian ZHAN, Yanxia ZOU, Shangzhong JIN. Testing technology of vacuum ultraviolet spectral radiance[J]. Journal of Applied Optics, 2022, 43(6): 1138
Paper Information
Category: Research Articles
Received: Jun. 13, 2022
Accepted: --
Published Online: Nov. 18, 2022
The Author Email:
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20