Optics and Precision Engineering, Volume. 13, Issue 3, 298(2005)
[in Chinese]
[1] [1] LIU Y T, WANG C W. A self-moving precision positioning stage utilizing impact force of spring-mounted piezoelectric actuator[J]. Sensors and Actuators A, 2002, 102: 83- 92.
[4] [4] WU T, PAUL I R. Dynamic peak amplitude analysis and bonding layer effects of piezoelectric bimorph cantilevers[J]. Smart Materials and Structures, 2004, 13(1) :203-210.
[5] [5] MORITA T, YOSHIDA R, OKAMOTO Y, etal. Three DOF parallel link mechanism utilizing smooth impact drive mechanism [J]. Journal of the International Societies for Precision Engineering and Nanotechnology , 2002,26 (3): 289-295.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. [J]. Optics and Precision Engineering, 2005, 13(3): 298