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Microelectronics, Volume. 53, Issue 3, 518(2023)

A Two-Dimensional Capacitance Extraction Technology of Interconnects Based on Segment Reservation Method

CAI Zhikuang1...2, YANG Hang1, GU Peng1, GUO Jingjing1, WANG Zixuan1,2, and GUO Yufeng12 |Show fewer author(s)
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    CAI Zhikuang, YANG Hang, GU Peng, GUO Jingjing, WANG Zixuan, GUO Yufeng. A Two-Dimensional Capacitance Extraction Technology of Interconnects Based on Segment Reservation Method[J]. Microelectronics, 2023, 53(3): 518

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    Received: Jun. 27, 2022

    Accepted: --

    Published Online: Jan. 3, 2024

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.220246

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology