Optics and Precision Engineering, Volume. 20, Issue 12, 2696(2012)
Design and fabrication of flexible MEMS anti-drag skin
A novel flexible Microelectromechanical System(MEMS) anti-drag skin was proposed based on the drag reduction with lingering-micro-bubble generated by electrolysis, and the fabrication of flexible MEMS anti-drag skin was designed. The MEMS skin composed of a flexible substrate layer, a metal electrode layer and a micro-well-array layer was designed,and two process routes based on MEMS were developed for the skin fabrication.Then,the polydimethylsiloxane(PDMS) and SU-8 were used to fabricate the micro-well-array layer, respectively. Several key steps in these processes were studied and a specimen was fabricated using SU-8. The specimen has a thickness of 90 μm and contains 6.25×104 cylindrical wells with a depth of 50 μm and a diameter of 40 μm per square centimeter. It can be bent and attached on a Φ28 mm cylinder without damage. Results demonstrate that the MEMS is feasible to realize the anti-drag skin and the flexible MEMS anti-drag skin offers a novel way to reduce the skin friction of vehicles in water.
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LI Yong, LI Wen-ping, ZHU Xiao-gu. Design and fabrication of flexible MEMS anti-drag skin[J]. Optics and Precision Engineering, 2012, 20(12): 2696
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Received: Sep. 15, 2012
Accepted: --
Published Online: Jan. 7, 2013
The Author Email: Yong LI (liyong@mail.tsinghua.edu.cn)