Optics and Precision Engineering, Volume. 16, Issue 7, 1223(2008)

SCM-based nanomechanical property measurement system of AFM

YAN Yong-da1...2,*, FEI Wei-dong1, HU Zhen-jiang2, CHENG Xiang-jie2, SUN Tao2 and DONG Shen2 |Show fewer author(s)
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  • 2[in Chinese]
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    References(4)

    [1] [1] VANLANDINGHAN M R,MCKNIGHT S H,PALMESE G R,et al..Nanoscale indentation of polymer systems using the atomic force microscope[J].Journal of Adhesion,1997,64:31-59

    [2] [2] SUNDARARAJAN S,BHUSHAN B,NAMAZU T,et al..Mechanical property measurements of nanoscale structures using an atomic force microscope[J].Ultramicroscopy,2002,91(1-4):111-118

    [3] [3] KOJIM I,XU W T,FUJIMOTO T.Nanohardness measurement of carbon nitride thin films[J].Surf.Interface Ana.,2001,32:74-78

    [8] [8] OLIVER W C,PHARR G M.Measurement of hardness and elastic modulus by instrumented indentation:advance in understanding and refinements to methodology[J].J.Mater Res.,2004,19(1):3-20

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    YAN Yong-da, FEI Wei-dong, HU Zhen-jiang, CHENG Xiang-jie, SUN Tao, DONG Shen. SCM-based nanomechanical property measurement system of AFM[J]. Optics and Precision Engineering, 2008, 16(7): 1223

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    Paper Information

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    Received: Nov. 21, 2007

    Accepted: --

    Published Online: Feb. 28, 2010

    The Author Email: YAN Yong-da (yanyongda@yahoo.com.cn)

    DOI:

    CSTR:32186.14.

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