Fig. 1. Force diagram of non-Newtonian fluid on curved substrate

Fig. 2. Relationship between shear rate and stress of 950 K PMMA C% resist-coating

Fig. 3. Contrast of film thickness obtained at rotating speed of 2 000 r/min

Fig. 4. Contrast of film thickness obtained at rotating speed of 3 000 r/min

Fig. 5. Theoretical curve of center thickness at different rotating speeds

Fig. 6. Thickness of reference given by kayakuAM^［18］

Fig. 7. Variation of film thickness with vector radius