Spectroscopy and Spectral Analysis, Volume. 36, Issue 8, 2601(2016)
The Effect of Plasma Spatially Resolved During Diamond Film Deposited with HFCVD
References(3)
[3] [3] Chen G C, Li B, Li H, et al. Diamond and Related Materials, 2010, 9(2): 15.
[7] [7] Wang Xinchang, Zhao Tianqi, Sun Fanghong, et al. Diamond and Related Materials, 2014, 11(9): 339.
[8] [8] Linnik S A, Gaydaychuk A V. Vacuum, 2014, 12(1): 28.
Tools
Get Citation
Copy Citation Text
YI Cheng, WANG Chuan-xin, FAN Yong-zhi, DAI Kai, MA Zhi-bin, WANG Sheng-gao, MAN Wei-dong, WU Chao. The Effect of Plasma Spatially Resolved During Diamond Film Deposited with HFCVD[J]. Spectroscopy and Spectral Analysis, 2016, 36(8): 2601
Paper Information
Received: Jun. 5, 2015
Accepted: --
Published Online: Dec. 23, 2016
The Author Email:
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20