Journal of Synthetic Crystals, Volume. 49, Issue 9, 1641(2020)
Research on Surround Coating Removal Technology for Polysilicon
References(1)
[5] [5] Seidel H. Anisotropic etching of crystalline silicon in alkaline solutions［J］.Materials Science, Chemistry, 1990:3627-3629.
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ZHANG Ting, LIU Dawei, SONG Zhicheng, NI Yufeng, YANG Lu, LIU Junbao. Research on Surround Coating Removal Technology for Polysilicon[J]. Journal of Synthetic Crystals, 2020, 49(9): 1641
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Received: --
Accepted: --
Published Online: Nov. 11, 2020
The Author Email: Ting ZHANG (244190871@qq.com)
CSTR:32186.14.
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