Acta Photonica Sinica, Volume. 36, Issue 4, 726(2007)

The 2-D Grating's Spectrum Analysis and Application in Precise Measurement

[in Chinese]1, [in Chinese]1, and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(5)

    [1] [1] SPIES A.Linear and angular encoders for the high resolution range[C].Proc of 9th IPES.Braunschweig,Germany,1997:54-57.

    [2] [2] THIEL J,SPANNER E.Interferential linear with 270 mm measuring length for nanometrology[OL],http://www.automet.com/Heidenhain/techdata/thiel.html.

    [3] [3] TEIMEL A.Technology and applications of grating intererometer in high-precision measurement[J].Precision Engineering,1992,14(3):147-154.

    [5] [5] TETSUO Ohara.Scanning Probe Position Encoder (SPPE)-a new approach for a high precision and high speed position measurement system[OL].http://www.nanowave.com/SPIE paper web.pdf,2001.

    [6] [6] WANG Xuanze,DONG Xiaohua,GUO Jun.Two-dimensional displacement sensing using a cross diffraction grating scheme[J].Journal of Optics A:Pure and Applied Optics,2004,6(1):106-111.

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    [in Chinese], [in Chinese], [in Chinese]. The 2-D Grating's Spectrum Analysis and Application in Precise Measurement[J]. Acta Photonica Sinica, 2007, 36(4): 726

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    Paper Information

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    Received: Feb. 10, 2006

    Accepted: --

    Published Online: Sep. 17, 2007

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