Optics and Precision Engineering, Volume. 15, Issue 2, 206(2007)

Rotation-angle-accuracy measurement of piezo tilt platform

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    References(6)

    [5] [5] SAILER R,STRAUSS W S L,GSCHWEND M H,et al..Total internal reflection fluorescence spectroscopy for probing porphyrin fluorescence in cell membranes[J].SPIE,1996,2926:162-169.

    [6] [6] SHANG H M,TOH S L,FU Y,et al..Measurement of angle of rotation using circular optical grating[J].SPIE,2001,4317:72-78.

    [7] [7] FOO C,MADAN G,LAI T,et al..Michelson-interferometer-based method for measuring the angle of rotation[J].SPIE,2002,4588:320-325.

    [8] [8] APOSTOL D,DAMIAN V S,LOGOFATU P C,et al..Interferometric angular transducers[J].SPIE.1995,2461:548-510.

    [9] [9] KIM J W,KIM J A,KANG C S,et al..A novel Michelson interferometer combined with an autocollimator for the simulataneous measurement of linear and angular displacement[J].SPIE,2005,5879:1-11.

    [11] [11] PI User Manual PZ 107E S-330 Tip/Tilt Platform 2003-09-09[Z].

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Rotation-angle-accuracy measurement of piezo tilt platform[J]. Optics and Precision Engineering, 2007, 15(2): 206

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    Paper Information

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    Received: Feb. 22, 2006

    Accepted: --

    Published Online: Feb. 18, 2008

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