Semiconductor Optoelectronics, Volume. 44, Issue 4, 573(2023)
Plasma-Enhanced Atomic Layer Deposition of GaN Thin Films on GaAs Substrate
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QIU Hongyu, WANG Xinyi, DUAN Zhang, QIU Peng, LIU Heng, ZHU Xiaoli, TIAN Feng, WEI Huiyun, ZHENG Xinhe. Plasma-Enhanced Atomic Layer Deposition of GaN Thin Films on GaAs Substrate[J]. Semiconductor Optoelectronics, 2023, 44(4): 573
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Received: Mar. 15, 2023
Accepted: --
Published Online: Nov. 26, 2023
The Author Email: Xinhe ZHENG (xinhezheng@ustb.edu.cn)
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