Calibration of scanning mirror coordinate axes based on nonlinear algorithms

LI Yong; ZHOU Zhehai; LI Zhongxiang; CHEN Li

doi:10.14016/j.cnki.jgzz.2024.12.067

Laser Journal, Volume. 45, Issue 12, 67(2024)

Calibration of scanning mirror coordinate axes based on nonlinear algorithms

LI Yong¹, ZHOU Zhehai^1,2、*, LI Zhongxiang¹, and CHEN Li¹

¹Key Laboratory of Modern Optoelectronic Measurement Technology for Mechanical Industry, Beijing Information Science and Technology University, Beijing 100192, China

²Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instruments, Beijing Information Science and Technology University, Beijing 100192, China

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LI Yong, ZHOU Zhehai, LI Zhongxiang, CHEN Li. Calibration of scanning mirror coordinate axes based on nonlinear algorithms[J]. Laser Journal, 2024, 45(12): 67

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Paper Information

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Received: Mar. 2, 2024

Accepted: Mar. 10, 2025

Published Online: Mar. 10, 2025

The Author Email: Zhehai ZHOU (zhouzhehai@bistu.edu.cn)

DOI:10.14016/j.cnki.jgzz.2024.12.067

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology