Laser Journal, Volume. 45, Issue 12, 67(2024)

Calibration of scanning mirror coordinate axes based on nonlinear algorithms

LI Yong1, ZHOU Zhehai1,2、*, LI Zhongxiang1, and CHEN Li1
Author Affiliations
  • 1Key Laboratory of Modern Optoelectronic Measurement Technology for Mechanical Industry, Beijing Information Science and Technology University, Beijing 100192, China
  • 2Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instruments, Beijing Information Science and Technology University, Beijing 100192, China
  • show less

    Line-structured light scanning measurement technology based on galvanometer mirrors has wide applications due to its outstanding accuracy and high efficiency in the field of 3D measurement. However, the difficulty in precisely aligning the laser with the galvanometer's rotation axis during installation significantly impacts the calibration accuracy of the galvanometer coordinate axis, thereby affecting the overall measurement system's accuracy. Consequently, the precise calibration of the scanning galvanometer coordinate axis has become one of the key challenges in achieving high-precision measurements. A nonlinear algorithm is proposed which uses iteratively approximating to find the optimal solution based on the nonlinear characteristics of the equations to be solved, and the precision calibration of the galvanometer coordinate axis is realized. The theory and processing steps of this calibration method are introduced, and by conducting multiple measurements on a triangular calibration block, it is found that the absolute error of this method ranges from 0.201 1 mm to 0.492 7 mm, lower than the values of 0.313 5 mm to 0.770 3 mm using the traditional least squares method, which indicates that the proposed method significantly improves both accuracy and stability. Therefore, the method provides a new solution for high-precision measurement based on scanning galvanometers, and presents substantial application values.

    Tools

    Get Citation

    Copy Citation Text

    LI Yong, ZHOU Zhehai, LI Zhongxiang, CHEN Li. Calibration of scanning mirror coordinate axes based on nonlinear algorithms[J]. Laser Journal, 2024, 45(12): 67

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Mar. 2, 2024

    Accepted: Mar. 10, 2025

    Published Online: Mar. 10, 2025

    The Author Email: Zhehai ZHOU (zhouzhehai@bistu.edu.cn)

    DOI:10.14016/j.cnki.jgzz.2024.12.067

    Topics